Design and Modeling of MEMS Microgrippers for Laser-Based Additive Manufacturing

The geometrical constraints and dimensional tolerances lead to specific design issues of MEMS manipulators for biological applications. target properties become even more important in the case vitro manipulation cells. Several solutions have been proposed literature, however, some related thermal heating microgripper tips electric voltage effects still remain unsolved. This paper reports additive manufacturing (DFAM) micro-electro mechanical systems (MEMS) microgrippers. limitations imposed by micro-stereolithography fabrication process are considered. solution this study is based on compliant structures external actuation; layout provides potential elimination main cells micro-manipulators represented excessive exposure samples. simulation through finite elements method (FEM) models structure terms force–displacement relation stress distribution supports evolution proposed.